Custom Calibration Target Selection
Guide Overview
Backlight & Transmission Illumination Solutions
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Chrome on soda lime glass (float glass) |
Chrome on quartz glass (fused silica) |
Photosensitive Ink on Float Glass |
Chrome on glass target with backlight |
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Ultimate Solution |
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Min. Feature Size |
2µm | 0.5µm | 80µm | 0.5µm |
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Feature size Accuracy |
±1µm | ±1µm, ±0.1µm, ±0.05µm | ±10µm | ±1µm, ±0.1µm, ±0.05µm |
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Feature Spacing Accuracy |
±1µm | ±1µm, ±0.1µm, ±0.05µm | ±10µm | ±1µm, ±0.1µm, ±0.05µm |
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Feature Position Accuracy |
Dimension ≤ 300mm: ±0.001mm | Dimension ≤ 300mm: ±0.001mm |
Pattern Area 0~200mm: within 30µm |
Dimension ≤ 300mm: ±0.001mm |
| Dimension > 300mm: ±0.002~0.005mm | Dimension > 300mm: ±0.002~0.005mm | Pattern Area 200~300mm: within 40µm | Dimension > 300mm: ±0.003~0.005mm | |
| Pattern Area 300~400mm: within 50µm | Pattern Area 300~400mm: within 50µm | Pattern Area 300~400mm: within 50µm | Pattern Area 300~400mm: within 50µm | |
| Pattern Area 400~500mm: within 60µm | Pattern Area 400~500mm: within 60µm | Pattern Area 400~500mm: within 60µm | Pattern Area 400~500mm: within 60µm | |
| Pattern Area 500~600mm: within 70µm | Pattern Area 500~600mm: within 70µm | Pattern Area 500~600mm: within 70µm | Pattern Area 500~600mm: within 70µm | |
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Max. Overall Dimension |
1092 x 813mm | 1200 x 850mm | 2500 x 1580mm | 1200 x 850mm |
Front & Reflective Illumination Solutions
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| Chome on Ceramic Sunbstrate |
Photosensitive Ink on Carbon Fiber |
High resolution printing on aluminum |
Photosensitive ink on aluminum |
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Ultimate Solution |
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Min. Feature Size |
60µm | 60µm | 60µm | 15µm |
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Feature size Accuracy |
±3µm | ±10µm | ±10µm | ±10µm |
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Feature Spacing Accuracy |
±3µm | ±10µm | ±10µm | ±10µm |
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Feature Position Accuracy |
±0.002mm | Pattern Area 0~200mm: within 30µm | Pattern Area 0~200mm: within 30µm | Pattern Area 0~200mm: within 30µm |
| ±0.002mm | Pattern Area 200~300mm: within 40µm | Pattern Area 200~300mm: within 40µm | Pattern Area 200~400mm: within 40µm | |
| ±0.002mm | Pattern Area 300~400mm: within 50µm | Pattern Area 300~400mm: within 50µm | Pattern Area 300~400mm: within 50µm | |
| ±0.002mm | Pattern Area 400~500mm: within 60µm | Pattern Area 400~500mm: within 60µm | Pattern Area 400~500mm: within 60µm | |
| ±0.002mm | Pattern Area 500~600mm: within 70µm | Pattern Area 500~600mm: within 70µm | Pattern Area 500~600mm: within 70µm | |
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Max. Overall Dimension |
228 x 228mm | 2500 x 1580mm | 2500 x 1580mm | 2500 x 1580mm |